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发明名称
MICRO-ELECTROMECHANICAL SWITCH HAVING A DEFORMABLE ELASTOMERIC CONDUCTIVE ELEMENT
摘要
申请公布号
EP1535296(A4)
申请公布日期
2007.04.04
申请号
EP20020746591
申请日期
2002.06.14
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
DELIGIANNI, HARIKLIA;GREENBERG, DAVID, R.;JAHNES, CHRISTOPHER, V.;LUND, JENNIFER, L.;SAENGER, KATHERINE, L.;VOLANT, RICHARD, P.
分类号
H01H57/00;H01H59/00;H01L21/00
主分类号
H01H57/00
代理机构
代理人
主权项
地址
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