Method and system for filtering statistical process data to enhance process performance

摘要

A data filter for filtering process data to a statistical control model is provided to enhance the performance of the control model. The data filter selects a set of template data from a set of statistical process data. A set of grids is formed comprising the set of template data and a set of sample data and an absolute distance is calculated between each point of a grid in the set of grids and a minimum accumulated distance of a point of the grid is calculated using the absolute distance. A global optimal path is identified based on the minimum accumulated distance of the point, and a set of sample data is remapped to form a set of warped data based on the global optimal path and the set of reference data.