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发明名称
METHOD FOR MANUFACTURING RECESS GATE IN SEMICONDUCTOR DEVICE
摘要
申请公布号
KR20070036472(A)
申请公布日期
2007.04.03
申请号
KR20050091517
申请日期
2005.09.29
申请人
HYNIX SEMICONDUCTOR INC.
发明人
KIM, JONG SU
分类号
H01L21/336
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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