发明名称 |
Film bulk acoustic resonator filter |
摘要 |
A ladder-type film bulk acoustic resonator (FBAR) filter comprises two series FBARs and two parallel FBARs. Each FBAR has a top electrode, a bottom electrode, and a piezoelectric layer sandwiched between the top and bottom electrodes. The top electrodes of the two series FBARs form part of a signal line of a coplanar waveguide transmission line. The top electrodes of the two series FBARs are connected to associated circuitry. The two series FBARs have a common bottom electrode.
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申请公布号 |
US7199504(B2) |
申请公布日期 |
2007.04.03 |
申请号 |
US20030718799 |
申请日期 |
2003.11.24 |
申请人 |
TDK CORPORATION |
发明人 |
KOMURO EIJU;IMURA MASAAKI;SU QINGXIN;KIRBY PAUL B.;WHATMORE ROGER W. |
分类号 |
H01L41/09;H03H9/54;H01L41/187;H03H3/02;H03H3/04;H03H9/17;H03H9/56;H03H9/58 |
主分类号 |
H01L41/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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