发明名称 |
Multilayered structure and method of manufacturing the same, and ultrasonic transducer |
摘要 |
A multilayered structure which includes insulating layers and electrode layers and can be easily arrayed. The multilayered structure is manufactured by using a substrate on which first and second groups of columnar structures are arranged in a predetermined arrangement, and includes: a first electrode layer formed by forming a film of a conducting material on the substrate or an insulating layer except for portions around the first group of columnar structures; an insulating layer formed by spraying powder of an insulating material on the first electrode layer to deposit the powder thereon; a second electrode layer formed by forming a film of a conducting material on the insulating layer except for portions around the second group of columnar structures; and interconnections formed by filing, with a conducting material, holes formed by removing the columnar structures from the substrate.
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申请公布号 |
US7199509(B2) |
申请公布日期 |
2007.04.03 |
申请号 |
US20050030069 |
申请日期 |
2005.01.07 |
申请人 |
FUJI PHOTO FILM CO., LTD. |
发明人 |
KUNIYASU TOSHIAKI;MAEDA HIROSHI;NISHIDA KAZUHIRO;FUJIWARA TAKAYUKI |
分类号 |
G01N29/24;H01L41/047;A61B8/00;B06B1/06;H01L41/083;H01L41/24;H04R17/00 |
主分类号 |
G01N29/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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