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发明名称
METHOD FOR FORMING CAPACITOR OF SEMICONDUCTOR DEVICE
摘要
申请公布号
KR20070036737(A)
申请公布日期
2007.04.03
申请号
KR20060096549
申请日期
2006.09.29
申请人
HYNIX SEMICONDUCTOR INC.
发明人
LEE, KEE JEUNG;KIL, DEOK SIN;SONG, HAN SANG;YEOM, SEUNG JIN;KIM, YOUNG DAE;KIM, JIN HYOCK;ROH, JAE SUNG
分类号
H01L21/8242;H01L27/108
主分类号
H01L21/8242
代理机构
代理人
主权项
地址
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