发明名称 |
Adaptive electrostatic pin chuck |
摘要 |
Disclosed is an electrostatic chuck and system for maintaining a device flat within the electrostatic chuck. The electrostatic chuck has a plate, height adjustment mechanisms connected to the plate; and electrostatic chuck pins connected to the height adjustment mechanisms. The system provides a measurement tool adapted to measure the flatness of the device held by the electrostatic chuck pins and a computer connected to the height adjustment mechanisms and the measurement tool. The computer adjusts the flatness of the device by adjusting the height adjustment mechanisms based on feedback from the measurement tool. The computer is adapted to change the shape of the device to conform to a pre-existing standard.
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申请公布号 |
US7198276(B2) |
申请公布日期 |
2007.04.03 |
申请号 |
US20030605773 |
申请日期 |
2003.10.24 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
CALDWELL BRIAN NEAL;JEFFER RAYMOND WALTER;KINDT LOUIS M. |
分类号 |
B23B31/28;H01L21/00;H01L21/683 |
主分类号 |
B23B31/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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