| 摘要 |
<p>An apparatus for detecting hazes of a photomask surface and a detecting method thereof are provided to detect exactly the existence of hazes in real time by using a haze detector. An apparatus for detecting hazes of a photomask surface includes a laser(10) for emitting a predetermined beam, a beam forming telescope(13) for determining the shape of the predetermined beam, a Homogenizer for obtaining uniform energy distribution from the predetermined beam, a focusing optical system(15) for controlling the size of the predetermined beam, an energy detector(18) for measuring the intensity of the predetermined beam on a photomask, a haze detector(30) for detecting the existence of hazes in real time, and a microscope(20) for controlling the variation of a surface of the photomask and the position of hazes.</p> |
