发明名称 SOLID INSPECTING APPARATUS
摘要 A solid inspecting apparatus is provided to perform simply easily an object inspecting process by using a movable polarization mirror. A loader and an unloader are installed at one side of a base unit. An object is loaded/unloaded to/from the loader/unloader by using a finger. A position controlling unit is installed on the base unit in order to control the position of the object. First and second cameras(200,201) are installed on the position controlling unit in order to photograph the object. Image forming units(400,401) display the image of the object. A polarization mirror(500) is installed between the image forming units by using a hinge-connection mechanism.
申请公布号 KR100702107(B1) 申请公布日期 2007.03.30
申请号 KR20050091453 申请日期 2005.09.29
申请人 发明人
分类号 H01L21/66 主分类号 H01L21/66
代理机构 代理人
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