| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a radio frequency (RF) matching network for a vacuum reaction chamber which has a light weight, the less number of damages and no necessity for water-cooling and therefore can save production and running costs, and to provide a method of arranging the same. <P>SOLUTION: The RF matching network of a vacuum reaction chamber includes first to nth pieces of RF power sources, and each RF power source has each different frequency, and frequencies decrease gradually from an RF input port 1 to an RF input port n. An ith circuit is constituted between an RF input port and an output port of an ith frequency, and this ith circuit has a high impedance in the output ports against all the RF power source frequencies except the ith frequency, and after the ith circuit and the ith frequency RF power source are connected, a measurement value from the output port in a direction of the ith circuit has a first impedance at the ith frequency, and likewise, a measurement value from the output port in a reversed direction of the ith circuit has a second impedance at the ith frequency, and the first impedance value and the second impedance value make a conjugate matching. <P>COPYRIGHT: (C)2007,JPO&INPIT |
