| 摘要 |
PROBLEM TO BE SOLVED: To provide a structure of a mounting table that can be protected from a crack of a ceramic mounting table and a crack in a joining portion to the support pillar that supports the table. SOLUTION: The structure of a mounting table has a ceramic mounting table 32 for mounting an object to be heat-treated W to subject the object to be heat-treated W to a given heat-treatment in a processing container 4 and also has a supporting means 31 for supporting the mounting table, wherein a silica-glass coat layer 54 is formed on the surface of the mounting table in such a state that a compressive stress in the plane direction is maintained. COPYRIGHT: (C)2007,JPO&INPIT |
