BLOT DEFECT DETECTING METHOD FOR SOLID-STATE IMAGING ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide an inspection method for a solid-state imaging element which automatically executes determination of blot defective. SOLUTION: A binarizing means binarizes image data of an image storage device with a first threshold, a defect area summation means calculates a defective area S1of a blot candidate, an area comparing means detects a blot candidate having a defective area S1smaller than a specification area Smas a noise, and an element thereof is determined as a non-defective product. For the defective area S1having a large defective area, a peak cut processing means eliminates a contrast peak value, a degeneration/expansion processing means restores the shape of a partially omitted contrast component to a shape to be detected as a blot in an organoleptic test, a smoothing means eliminates a high frequency noise which is not detected in the organoleptic test to smooth an discontinuous contrast component, and restored image data are generated. The binarizing means binarizes the restored image data with a second threshold, a defective area calculating means calculates a defective area S2, an area comparing means detects a candidate blot having the defective area S2smaller than a specification area Snas a noise and an element thereof is determined as a non-defective product. A candidate blot having a large defective area S2is detected as a blot, and an element thereof is determined as a defective product. COPYRIGHT: (C)2007,JPO&INPIT