| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature control method of a heated body in which temperature control on the heated boy can be carried out precisely concerning the temperature control method of the heated body. SOLUTION: In a device in which a plurality of coils are used to heat the heated body by induction heating, this method is constituted of a process 1 of determining temperature difference between a target temperature of the heated body and a present temperature when changing temperature of the heated body from the present temperature, a process 2 of changing voltage for each coil beforehand and obtaining a temperature change rate of the heated body per 1 V in each coil, a process 3 of making this temperature change rate as a coefficient, and calculating change voltage in each coil from simultaneous linear equations of this coefficient and the temperature difference determined in the process 1, a process 4 of setting increase or decrease in the present voltage in each coil based on the changed voltage calculated in each coil, and carrying out the temperature control on the heated body. COPYRIGHT: (C)2007,JPO&INPIT
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