| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor device capable of reducing variation in detection sensitivity of physical quantity between a plurality of sensor devices. SOLUTION: The sensor device comprises: a capacitor 21 for detecting physical quantity that has a semiconductor micro machine structure and has capacity varying according to the physical quantity provided from the outside; a capacitor 22 for reference whose variation in capacity according to the physical quantity is smaller than that of the capacitor 21 for detecting physical quantity; and a detecting section 3 for detecting the physical quantity based on the difference between the capacity Cs of the capacitor 21 and the capacity Cref of the capacitor 22. The capacitor 22 for reference has a semiconductor micro machine structure and is formed on the same substrate as the capacitor 21 for detecting physical quantity. COPYRIGHT: (C)2007,JPO&INPIT
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