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发明名称
摘要
申请公布号
JP2007507874(A)
申请公布日期
2007.03.29
申请号
JP20060530756
申请日期
2004.09.30
申请人
发明人
分类号
H01L21/02;H01L21/20;H01L21/762;H01L27/12
主分类号
H01L21/02
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