| 摘要 |
The invention relates to a device for storing platelike substrates (8), particularly wafers or test wafers, like those, in particular, used for manufacturing electronic components. The aim of the invention is to make a reliable access to the substrates (8) possible even when storage elements (1), which can be separated from one another, of the device are affected by manufacturing mistakes. For such a device that, for each substrate (8), has a number of storage elements (1), which follow one another in a direction of stacking and which can move relative to one another, in which the storage elements (1) have a stacking area (2), which is provided for placing the respective storage element (1)inside a stack (3) of storage elements (1), compensating means (5) are therefore provided in order to compensate for stacking errors in the direction of stacking. |
