PLASMA GENERATOR, SURFACE TREATMENT DEVICE, LIGHT SOURCE, METHOD FOR GENERATING PLASMA, METHOD FOR TREATING SURFACE, AND METHOD FOR LIGHT IRRADIATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a plasma generator and a method for generating plasma which generate minute plasma by a simple method.

SOLUTION: A first electrode 30 consisting of a conductive member coated with an insulator or a dielectric is installed at the upper part of a second electrode 20. A generating point 10 in which coating is made thinner than other portions is provided at the first electrode 30. When an AC voltage or a pulse voltage is impressed between the first electrode 30 and the second electrode 20 from a power source 40, electric field is concentrated on the generating point 10 and plasma is generated in its surrounding.

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