| 摘要 |
PROBLEM TO BE SOLVED: To provide a flat discharge tube in which exhaust of air and supply of discharge gas in a discharging space are carried out smoothly in a production process. SOLUTION: Between both base plates 12, 13, an intermediate supporting frame 14 is intervened which faces each outer circumferential edge of each inner side of these base plates and holds them at regular intervals. At an outer circumferential edge part of the intermediate supporting frame 14 is provided with a thick wall part which is thicker than other parts of the intermediate supporting frame 14 so that a projection 33 does not interfere with the both base plates 12, 13. A supply/exhaust port 31 is provided into which a supply/exhaust pipe P having a bigger outer diameter than a distance between the both base plates can be inserted with help of this projection 33, and the above supply/exhaust pipe P is fixed with the above supply/exhaust port 31. As a result, a flow passage area of the supply/exhaust pipe P is secured and a supply/exhaust of air and gas in the discharging space can be carried out smoothly. COPYRIGHT: (C)2007,JPO&INPIT
|
