DEBRIS MITIGATION SYSTEM WITH IMPROVED GAS DISTRIBUTION

摘要

The present invention relates to a debris mitigation system, in particular for use in a radiation unit for EUV radiation and/or X-rays. The debris mitigation system comprises a foil trap (11) having several passages allowing a straight passage of radiation and one or several feed pipes (5) for gas supply of buffer gas (7) to said foil trap. The foil trap has at least one interior space (14) extending over several of said passages, wherein the feed pipes open into that space. The present debris mitigation system allows effective debris mitigation.