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发明名称
A defect detection device of thin film
摘要
申请公布号
KR100701598(B1)
申请公布日期
2007.03.29
申请号
KR20050026453
申请日期
2005.03.30
申请人
发明人
分类号
G02F1/13
主分类号
G02F1/13
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代理人
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