| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma processing apparatus in which component consumption cost is reduced by prolonging the lifetime of an electrode member composing a lower electrode and contamination on the inside of the apparatus due to adhesion of scattering matters can be prevented, and to provide an electrode member for the plasma processing apparatus, a process for producing the electrode member and a method for recycling it. <P>SOLUTION: An electrode member 46 abutting against the lower surface of a work in a plasma processing apparatus performing plasma processing of a planar work is constituted by soldering a planar adsorption member 45 having a plurality of through holes 45a and a cooling plate 44. A thermal spray film 65 is formed on the upper surface of the adsorption member 45 by thermally spraying alumina, and the edge of a hole 45d opening the through hole 45a is covered with the thermal spray film 65. <P>COPYRIGHT: (C)2007,JPO&INPIT |
