| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma treating method and device capable of keeping a temperature at a low value while flatly keeping a flexible board as a sheet. SOLUTION: The plasma treating device is composed of a vacuum chamber, a gas supply means supplying the inside of the vacuum chamber with a gas and an exhaust means exhausting the inside of the vacuum chamber. The plasma treating device is further composed of a pressure control valve controlling the inside of the vacuum chamber at a specified pressure, an electrode with a placed tray holding the board and a power supply applying a power to the electrode. In such a plasma treating device, the tray has a detachable pressure-sensitive adhesive sheet on its surface, and the pressure-sensitive adhesive sheet has a shape having irregularities. COPYRIGHT: (C)2007,JPO&INPIT |
