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发明名称
Sicherheitseinrichtung und Verfahren zum Auslösen einer Notabschaltung einer Kristallzüchtungsanlage
摘要
申请公布号
DE102005041591(B4)
申请公布日期
2007.03.29
申请号
DE200510041591
申请日期
2005.09.01
申请人
SILTRONIC AG
发明人
PARDUBITZKI, ALFRED;GUENTHER, ANTON
分类号
H02H5/00;C30B15/20
主分类号
H02H5/00
代理机构
代理人
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