| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve the shield effect of a detection unit. <P>SOLUTION: An acceleration sensor consists of the detection unit, a silicon shielding substrate, and a base substrate. The detection unit is provided with a weight and a detection unit for detecting the posture change of the weight. The silicon shielding substrate comprises a recess which can fully include the detection unit. The silicon shielding substrate is provided with a signal-processing circuit which detects the posture change of the weight on the basis of the change of the constant of the detection unit, and furthermore, changes the detected posture change of the weight into the amount of dynamics. The base substrate is provided with a shield so as to close the opening of the recess of the silicon shielding substrate. The silicon shielding substrate and the base substrate are jointed via joint material. Further, the detection unit is electrically connected with the signal-processing circuit via the joint material. The detection unit with low tolerance to external noises can be shielded by the silicon shielding substrate and shielding unit. <P>COPYRIGHT: (C)2007,JPO&INPIT |
