发明名称 |
Method for making carbon nanotube-based device |
摘要 |
A method for making a carbon nanotube-based device is provided. A substrate with a shadow mask layer formed thereon is provided, to define an unmasked surface area on the substrate. The substrate is rotated around an axis. A catalyst layer including at least one catalyst block is formed on the unmasked surface area of the substrate. A thickness of the at least one catalyst block is decreased gradually from a first end thereof to an opposite second end thereof, and somewhere the at least one catalyst block having a region with a thickness proximal or equal to an optimum thickness at which carbon nanotubes growing fastest. A carbon source gas is introduced. At least one carbon nanotube array extending from the catalyst layer using a chemical vapor deposition process is formed. The at least one carbon nanotube array is arc-shaped, and bend in a direction of deviating from the region.
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申请公布号 |
US2007071895(A1) |
申请公布日期 |
2007.03.29 |
申请号 |
US20060416748 |
申请日期 |
2006.05.03 |
申请人 |
HON HAI PRECISION INDUSTRY CO., LTD. |
发明人 |
LIU LIANG;FAN SHOU-SHAN |
分类号 |
C23C16/00;B05D1/32;B05D3/10 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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