| 摘要 |
PROBLEM TO BE SOLVED: To provide a mechanism device that prevents sticking, by which improvement of a manufacturing yield is expected. SOLUTION: This device is provided with: a substrate 2 formed by an insulating material; a lower part electrode part 3 formed on the substrate 2; and an upper part electrode part 4 having a cantilever beam structure part arranged in an opposite position of the lower part electrode part 3. Since a projecting part 8 is provided in the lower part electrode part 4, contact surfaces of the driven upper part electrode part 4 and lower part electrode part 3 are reduced, sticking is prevented by restoring force of the cantilever beam structure part 5 of the upper part electrode 4 by mitigating agglutination by moisture. By preventing sticking, the improvement of the manufacturing yield of the mechanism device is expected. COPYRIGHT: (C)2007,JPO&INPIT
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