| 摘要 |
A heating geometric measure equipment ( 10 ) for measuring geometric tolerance of a sample ( 60 ) under heating atmosphere. The measure equipment ( 10 ) includes a temperature controlling case ( 30 ) and an optical sensor ( 20 ). The case ( 30 ) includes a base ( 40 ) and a cover ( 50 ) having a window ( 500 ) clipped on the case ( 30 ). The case ( 30 ) has a supporting section ( 41 ) defining a convective chamber therein and a partition ( 44 ) on the supporting section ( 41 ). The partition ( 44 ) and the cover ( 50 ) jointly define a heating chamber ( 49 ). A vent ( 402 ) communicating with the heating chamber ( 49 ) and the convective chamber ( 42 ) is defined on the partition ( 400 ). A sample carrier ( 46 ) having a datum plane ( 462 ) on an upper surface thereof is provided above the vent ( 402 ). A number of air tubes ( 48 ) are set around the sample carrier ( 46 ) with openings facing the sample carrier ( 46 ). The sensor ( 20 ) is horizontally movable above the cover ( 60 ) of the case ( 30 ). Incident beams ( 200, 202, 204 ) from the sensor are projected on the datum plane ( 462 and the sample ( 46 ) via the window ( 500 ). Reflex beams ( 201, 203, 205 ) are reflected from the datum plane ( 462 ) and the sample ( 60 ). The geometric tolerance can be measured by analyzing the incident beams ( 200, 202, 204 ) and the reflex beams ( 201, 203, 20 ).
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