发明名称 |
Methode und Vorrichtung für die Definition von Mustern einer Fotomaske mittels einer Booleschen Kombination der Designdaten mit skalierten Designdaten |
摘要 |
A method of generating a mask for use in printing a target pattern on a substrate. The method includes the steps of: (a) determining a target pattern representing a circuit design to be printed on a substrate; (b) generating a first pattern by scaling the target pattern by a factor of 0.5; and (c) generating a second pattern by performing a Boolean operation which combines the target pattern and the first pattern. The second pattern is then utilized to print the target pattern on the substrate. <IMAGE> |
申请公布号 |
DE60305377(T2) |
申请公布日期 |
2007.03.29 |
申请号 |
DE2003605377T |
申请日期 |
2003.03.25 |
申请人 |
ASML MASKTOOLS B.V. |
发明人 |
VAN DER BROEKE, DOUGLAS;CHEN, JANG FUNG |
分类号 |
G03F1/00;G03F7/20;G06F17/50;H01L21/027 |
主分类号 |
G03F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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