| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pattern forming method which enables the formation of a desired drawing pattern suppressing the occurrence of jaggies on a face to be exposed of a photosensitive layer without lowering an exposure speed and a high-definition desired pattern different in thickness and the efficient formation of a printed wiring board having a hole part such as a through hole and a via hole. <P>SOLUTION: The method includes setting at least any of an arrangement pitch of a drawing pixel (a), a tilt angle (b), a drawing pitch (c) and a phase difference (d) so that at least any of a jaggy pitch and a jaggy amplitude of jaggies generated by being reproduced in the drawing pixel formed by a pixel part to a photosensitive layer comprising a first photosensitive layer and a second photosensitive layer having a smaller light energy amount for curing than the first photosensitive layer, and performing exposure by modulating and controlling the pixel part at prescribed timing on the basis of pattern information. <P>COPYRIGHT: (C)2007,JPO&INPIT |
