| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for measuring an electron emission distribution capable of also measuring a high dissolving power electron emission distribution in a scanning tunnel microscope. SOLUTION: The apparatus includes a probe 6, a piezoelectric element for moving the probe 6 with respect to a sample 7, a bias voltage applying circuit for applying bias voltage to the sample 7, a preamplifier 10 for converting the tunnel current flowing across the probe 6 and the sample 7 to voltage and STM control circuits 3 successively provided on the output side of the preamplifier 10. A sample holding circuit 22 is provided between the preamplifier 10 and the STM control circuits 3 not only to measure (form) an STM image but also to measure (form) the electron emission distribution image. COPYRIGHT: (C)2007,JPO&INPIT
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