| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a radiation detection panel capable of arranging high-density of cells of anode electrodes and cathode electrodes, while avoiding performance degradation, and to provide a radiation detection panel. SOLUTION: The method includes a step of forming a generally circular anode electrode pattern having a 2-layer structure with a first and a second metal, a cathode electrode pattern having a similar 2-layer structure and surrounding the anode electrode pattern, and their respective outside layers of the second metal, respectively on a metal plate, a step of laminating metallic foils to integrate on the surface of the metal plate via insulating plates, a step of etching processing the metal foils laminated to integrate so that a general circular part can be removed, a step of processing the insulating plate with the metal foils as masks to form a viahole so as to reach the second metal of the anode electrode pattern, a step of forming a plating layer so as to fill the formed viahole, and a step of removing etching from the metal plate. COPYRIGHT: (C)2007,JPO&INPIT
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