SUBSTRATE SEPARATION SYSTEM

摘要

PROBLEM TO BE SOLVED: To prevent a substrate having a formed scribe line from being separated while it is conveyed. SOLUTION: A third substrate support unit where a bonded mother substrate having the formed scribe line is mounted, and which conveys the mounted bonded mother substrate, is composed of four belt conveyors 31. Respective belt conveyors 31 have a flat belt wound on a drive pulley 31a and a driven pulley 31b. The bonded mother substrate mounted on respective flat belt 31c is stably conveyed to the separation unit. COPYRIGHT: (C)2007,JPO&INPIT