发明名称 6K pulse repetition rate and above gas discharge laser system solid state pulse power system improvements
摘要 A method and apparatus for operating a very high repetition gas discharge laser system magnetic switch pulsed power system is disclosed, which may comprise a solid state switch, a charging power supply electrically connected to one side of the solid state switch; a charging inductor electrically connected to the other side of the solid state switch; a deque circuit electrically in parallel with the solid state switch comprising a deque switch; a peaking capacitor electrically connected to the charging inductor, a peaking capacitor charging control system operative to charge the peaking capacitor by opening the deque switch and leaving the solid state switch open and then shutting the solid state switch. The solid state switch may comprise a plurality of solid state switches electrically in parallel.
申请公布号 US2007071047(A1) 申请公布日期 2007.03.29
申请号 US20050300979 申请日期 2005.12.15
申请人 CYMER, INC. 发明人 HUANG CHAOFENG;MELCHER PAUL C.;NESS RICHARD M.
分类号 H01S3/04;H01S3/00;H01S3/22;H01S3/223 主分类号 H01S3/04
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