发明名称 |
Energy coupled superlattice structures for silicon based lasers and modulators |
摘要 |
A waveguide structure includes a SOI substrate. A core structure is formed on the SOI substrate comprising a plurality of multilayers having alternating or aperiodically distributed thin layers of either Si-rich oxide (SRO), Si-rich nitride (SRN) or Si-rich oxynitride (SRON). The multilayers are doped with a rare earth material so as to extend the emission range of the waveguide structure to the near infrared region. A low index cladding includes conductive oxides to act as electrodes.
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申请公布号 |
US2007069332(A1) |
申请公布日期 |
2007.03.29 |
申请号 |
US20060490961 |
申请日期 |
2006.07.21 |
申请人 |
NEGRO LUCA D;YI JAE H;KIMERLING LIONEL C |
发明人 |
NEGRO LUCA D.;YI JAE H.;KIMERLING LIONEL C. |
分类号 |
H01L29/00 |
主分类号 |
H01L29/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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