发明名称 |
Viscoelastic polisher and polishing method using the same |
摘要 |
A viscoelastic polisher to be used for polishing. The viscoelastic polisher includes a viscoelastic layer provided on a major surface of a base disk and having a hole of a predetermined radius formed in a center portion thereof, and the base disk has a plurality of grooves equiangularly provided in the major surface thereof as extending radially outward from a center portion thereof. This arrangement ensures stable supply of an abrasive liquid, and obviates a need for formation of grooves in the viscoelastic layer. |
申请公布号 |
US2007072519(A1) |
申请公布日期 |
2007.03.29 |
申请号 |
US20040557018 |
申请日期 |
2004.07.09 |
申请人 |
TSUNEMOTO KURIYAGAWA |
发明人 |
NISHIHARA KAZUNARI;KURIYAGAWA TSUNEMOTO |
分类号 |
B24B1/00;B24B37/00;B24B29/00;B24B37/04;B24B37/20;B24B37/24;B24D11/00;B24D13/14 |
主分类号 |
B24B1/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|