| 摘要 |
A two-dimensional image of a substrate surface targeted for polishing is periodically picked up, and the image is analyzed to obtain an entropy H 1 , H 2 of the two-dimensional image. An end point of polishing is then determined according to the entropy H 1 , H 2 . Alternatively, other image characteristic value such as a difference statistic of the image may be employed instead of the entropy H 1 , H 2. |
