| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for moving a sample in a charged particle beam device that is hardly affected by vibration. SOLUTION: Vibration is reduced by contacting a sample holder supporting body 17 with moving back and forth by a sample holder support driving means strongly fixed to an objective lens 40 with a constant contact force to a sample holder 11, and a high resolution and a high working precision are enabled obtainable. Moreover, a voltage is applied between the sample holder 11 and the sample holder support 17, and the sample holder support driving means is controlled by a support control part 24 so that a contact electric current I flowing between the sample holder 11 and the sample holder support 17 can be maintained constant. COPYRIGHT: (C)2007,JPO&INPIT
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