| 摘要 |
PROBLEM TO BE SOLVED: To provide a high vibration reduction effect without relying on a variation in the weight of a device 1 even if the weight of the device is varied in a vibration damper A formed by supporting a surface plate 5 on which the device 1 is placed on a foundation member 3 through spring elements 4. SOLUTION: This vibration damper comprises a sensor 9 detecting the vibrating states of the device 1 and the surface plate 5 and a controller 10 controlling a linear motor 6 by the feedback of signals from the sensor. As the spring elements 4, coiled springs 4 with progressive characteristics having a spring constant increased in approximately proportional to an increase in a load are used so that, even if the weight of the device 1 is varied, the natural frequency thereof including the weight of the device is substantially constant. The coiled spring 4 comprises a linear area 4a and a non-linear area 4b, and may indicates linearity from a no-load state to a state in which only a load by the weight of the surface plate 5 is applied thereto. COPYRIGHT: (C)2007,JPO&INPIT
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