SMALL DIAMETER COATING TOOL, AND ITS MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a coating device capable of suppressing the film deposition rate on a small diameter tool without impairing the cleaning effect and performing the simultaneous treatment with a large diameter tool in a small diameter tool requesting a thin film small in difference between the dimensions before and after the coating. SOLUTION: A small diameter tool 10 with the outside diameter of a tool blade part for performing the coating being≥0.2 mm and <4.0 mm is inserted in and fixed to a rotating jig C at the position subjected to the irradiation of plasma ions 4 (or arc ions) in a coating device, and a shielding object 11 other than the small diameter tool 10 for shielding irradiation of the plasma ions 4 (or arc ions) is installed at the position where the space 14 from a tip of the small diameter tool 10 in the direction of the axis of rotation of the tool is≥1 mm and <20 mm. COPYRIGHT: (C)2007,JPO&INPIT