| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum vapor deposition apparatus for reducing a heat dissipation loss, by enabling a lid 11 of a crucible 6 containing a vapor deposition material to be closed and opened even in a vacuum atmosphere. SOLUTION: This vacuum vapor deposition apparatus comprises: the crucible 6 placed right under a coating roller 4 for supporting and moving a film 3 to be vapor-deposited; a container-moving means for moving the crucible 6 to a working position for vapor deposition and a retracting position for cleaning; and a lid opening and closing means 12 for opening and closing a lid 11 which moves along with the movement of the crucible 6 and uses the movement of the crucible 6 as a driving source. The lid opening and closing means 12 opens the lid 11 when the crucible 6 is at the working position, and closes the lid 11 when the crucible 6 is at the retracting position. COPYRIGHT: (C)2007,JPO&INPIT
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