Board for probe card, inspection apparatus, photo-fabrication apparatus and photo-fabrication method

摘要

A photo-fabrication apparatus ( 1 ) has a stage ( 2 ) for holding a base board ( 9 ) thereon, a feeding part ( 3 ) for feeding photosensitive material onto the base board ( 9 ), a layer forming part ( 4 ) for smoothly spreading the fed photosensitive material to form a material layer and a light emitting part ( 5 ) for emitting a spatially-modulated light beam onto the material layer. The photo-fabrication apparatus ( 1 ) forms a lot of elastic microstructures for fine probe and arranges the microstructures at microscopic intervals in a very small range with high positional accuracy on the base board ( 9 ) by repeating formation of a material layer and light emission. The microstructures become elastic probes through plating in a later process.