An accelerometer comprises a housing including a mass-supporting frame and a mass supported on the frame by a pair of outer spring members aligned along a first axis. The mass may comprise an outer mass connected to the pair of outer spring members and an inner mass connected to the outer mass by a number of inner spring members, the inner spring members aligned along one or more axes, which form a plane with which the axis of the outer spring members also may be aligned. Also provided is means for detecting rotation of the mass and translation of the inner mass. The center of gravity of the mass is below the axis to create torsions in response to linear accelerations. The accelerometer is capable of measuring acceleration along two axes. <IMAGE>
申请公布号
DE60030268(T2)
申请公布日期
2007.03.29
申请号
DE2000630268T
申请日期
2000.07.10
申请人
INFINEON TECHNOLOGIES SENSONOR AS
发明人
KVISTEROEY, TERJE;NORD, ASGEIR;BERSTEIN, RALPH;MOE, SIGURD;SKULSTAD, PAUL;MUNCH, KAI VIGGO;GOALBY, NORMAN