发明名称 METHOD OF MANUFACTURING ORGANIC TRANSISTOR
摘要 PROBLEM TO BE SOLVED: To provide an organic transistor with high electric characteristics by preventing an insulation layer of a channel interface from being damaged even with a strong organic solvent applied which can dissolve a highly movable low molecular weight material. SOLUTION: A method of manufacturing the organic transistor having at least a gate electrode, a gate insulation layer consisting at least of first and second layers, a source electrode, a drain electrode and an organic semiconductor layer includes steps of forming a first layer on the gate electrode, a step of irradiating ultraviolet rays to part of the surface of the first layer, a step of forming the source electrode and the drain electrode on the part with the ultraviolet rays irradiated, and a step of forming a second layer of a material different from that of the first layer at least between the source electrode and the drain electrode. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007081165(A) 申请公布日期 2007.03.29
申请号 JP20050267591 申请日期 2005.09.14
申请人 CANON INC 发明人 WADA TAKATSUGI
分类号 H01L29/786;H01L21/336;H01L51/05;H01L51/30;H01L51/40 主分类号 H01L29/786
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