| 摘要 |
The present invention is dedicated to a cost reduced anti-reflection film of a multi-lamination structure that is reduced in number of layers and increased in thickness of the same for the purpose of facilitating the total control of the film thickness and that can be manufactured in a simplified process so as to reduce the manufacturing cost. Three component layers are deposited one over another on a substrate ranging from 1.90<=N<SUB>s</SUB><=2.10 in refractive index at an arbitrary design basis wavelength within a wavelength range in and near visible band, and these layers exhibit optical properties as in the following table: <tables id="TABLE-US-00001" num="1"> <table frame="none" colsep="0" rowsep="0"> <tgroup align="left" colsep="0" rowsep="0" cols="3"> <colspec colname="OFFSET" colwidth="56PT" align="left"/> <colspec colname="1" colwidth="70PT" align="left"/> <colspec colname="2" colwidth="91PT" align="left"/> <THEAD> <ROW> <ENTRY/> <ENTRY/> </ROW> <ROW> <ENTRY/> <entry namest="OFFSET" nameend="2" align="center" rowsep="1"/> </ROW> <ROW> <ENTRY/> <ENTRY>Refractive Index 'n'</ENTRY> <ENTRY>Optical Film thickness 'nd'</ENTRY> </ROW> <ROW> <ENTRY/> <entry namest="OFFSET" nameend="2" align="center" rowsep="1"/> </ROW> </THEAD> <TBODY VALIGN="TOP"> <ROW> <ENTRY/> </ROW> </TBODY> </TGROUP> <tgroup align="left" colsep="0" rowsep="0" cols="4"> <colspec colname="OFFSET" colwidth="14PT" align="left"/> <colspec colname="1" colwidth="42PT" align="left"/> <colspec colname="2" colwidth="70PT" align="left"/> <colspec colname="3" colwidth="91PT" align="left"/> <TBODY VALIGN="TOP"> <ROW> <ENTRY/> <ENTRY>1st Layer</ENTRY> <ENTRY>1.54 <= N<SUB>1 </SUB><= 2.00</ENTRY> <ENTRY>0.465 lambda <= N<SUB>1</SUB>d<SUB>1 </SUB><= 0.575 lambda</ENTRY> </ROW> <ROW> <ENTRY/> <ENTRY>2nd Layer</ENTRY> <ENTRY>1.95 <= N<SUB>2 </SUB><= 2.63</ENTRY> <ENTRY>0.490 lambda <= N<SUB>2</SUB>d<SUB>2 </SUB><= 0.508 lambda</ENTRY> </ROW> <ROW> <ENTRY/> <ENTRY>3rd Layer</ENTRY> <ENTRY>1.35 <= N<SUB>3 </SUB><= 1.55</ENTRY> <ENTRY>0.245 lambda <= N<SUB>3</SUB>d<SUB>3 </SUB><= 0.255 lambda</ENTRY> </ROW> <ROW> <ENTRY/> <entry namest="OFFSET" nameend="3" align="center" rowsep="1"/> </ROW> </TBODY> </TGROUP> </TABLE> </TABLES>
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