POINT-OF-USE PROCESS CONTROL BLENDER SYSTEMS AND CORRESPONDING METHODS

摘要

A blender system is provided that maintains a chemical solution bath at desired concentrations. The blender system includes a blender unit (100) configured to receive and blend at least two chemical compounds (e.g., ammonia and hydrogen peroxide) and deliver a solution including a mixture of compounds at selected concentrations to a tank (2) that retains a selected volume of a chemical solution bath. The blender system further includes a controller (110) configured to maintain at least one compound within a selected concentration range in the chemical solution bath. The controller controls at least one of operation of the blender unit to maintain the concentration of the compound within a selected concentration range within the solution delivered to the tank, and a change in flow rate of solution into and out of the tank when a concentration of the compound within the chemical solution bath falls outside of a target range.