| 摘要 |
<P>PROBLEM TO BE SOLVED: To detect the state of vibration, without having to use using a separate sensor for detecting vibration, in an electric potential measuring device or a method, using mechanical vibration. <P>SOLUTION: The electric potential measuring device includes a capacitance varying means 102 for varying the capacitance between the surface of an object to be measured and a detection electrode 101 by the mechanical vibration, a charge detection means 108 for detecting the charge amount electrostatically induced in the detection electrode 101 by the capacitance varying means 102, and vibration generation/detection means 103, 104 for selectively performing a vibration generation function exciting the mechanical vibration and a detection function for detecting the state of mechanical vibration. <P>COPYRIGHT: (C)2007,JPO&INPIT |
