| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for inspecting a semiconductor device capable of inspecting signal leakage of input/output cell in a short time. SOLUTION: First, a test voltage is established on the signal terminal through the output buffer from a boundary scan resistor. Next, the current flowing through an electric source line for supplying a driving electric source to the output buffer circuit for a certain time is measured under the condition that the test potential established on the signal terminal is maintained, while making the output buffer circuit inactivation state. Then, if the current is larger than the predetermined value, the semiconductor device is determined to be unacceptable. In this method the signal leakage test can be carried out in a short time, because taking out of the potential of the signal terminal through the boundary scan resistor is not necessary. COPYRIGHT: (C)2007,JPO&INPIT
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