| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a fan filter unit capable of being firmly mounted on a fan case of a motor case and which generates less noise during operation. <P>SOLUTION: The fan filter unit is equipped with a centrifugal fan 22 inside a unit main body, the fan case 23 for accommodating the fan 22, a fan motor for driving the fan 22, the motor case 24 for accommodating the fan motor (not shown), and a filter. The motor case 24 is mounted on the fan case 23 via a sheet-like vibration-proof material 25a made of rubber or gel having a tension strength of 4 N/15 mm width or more and a tension strength of 50 N/15 mm width or less in a 5% elongation. <P>COPYRIGHT: (C)2007,JPO&INPIT |
