X-RAY REFLECTOMETRIC APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a reflectometric apparatus of which surface reflection ratio at a low angle (near 0°) is considerably larger than the surface reflection ratio at a high angle.

SOLUTION: The reflectometric apparatus includes a radiation source, adapted to irradiate a sample with radiation over a range of angles, relative to a surface of the sample and a detecting assembly positioned to receive the radiation reflected from the sample over the range of angles and to generate a signal responsive to the radiation and a shutter adjustably positioned to intercept the radiation. The shutter is provided at a blocking position where the radiation in a lower angle portion of the range is blocked so that only the radiation in a higher angle portion of the range can reach array and open position, where the radiation in the lower angle portion of the range is not blocked and substantially reaches the array.

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