发明名称 CONNECTION SUBSTRATE, MULTI-LAYER WIRING BOARD USING CONNECTION SUBSTRATE, SUBSTRATE FOR SEMICONDUCTOR PACKAGE, SEMICONDUCTOR PACKAGE, AND METHOD FOR MANUFACTURING THEM
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a connection substrate consisting of an insulating resin composition layer made of one or two or more layers, and a connection conductor that is formed so as to pass through the insulating resin composition layer in its thickness direction at a position where at least a conductor circuit is connected, a multi-layer wiring board using the connection substrate, and a substrate for a semiconductor package, the semiconductor package, and methods for manufacturing them. <P>SOLUTION: The manufacturing method of the connection substrate comprises a process which forms the connection conductor by removing selectively a first metal layer in a compound metal layer consisting of at least a second metal layer as a carrier and the first metal layer having a different removal condition compared with the second metal layer, a process which forms one or two or more insulation resin composition layers covering at least the side face of the connection conductor, and a process which polishes the insulation resin composition layer so as to expose the connection conductor. <P>COPYRIGHT: (C)2007,JPO&INPIT</p>
申请公布号 JP2007081433(A) 申请公布日期 2007.03.29
申请号 JP20060334828 申请日期 2006.12.12
申请人 HITACHI CHEM CO LTD 发明人 NAKAMURA HIDEHIRO;NAKASO AKISHI;ARIGA SHIGEHARU;INOUE FUMIO;ENOMOTO TETSUYA;MORIIKE MICHIO;HIROKI TAKANORI
分类号 H05K3/40;H01L23/12;H05K3/24;H05K3/46 主分类号 H05K3/40
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